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Application of Vacuum Plasma Cleaning Machine

The whole cleaning process of the vacuum plasma cleaning machine is as follows:

1) The workpiece to be cleaned is sent into a vacuum type and fixed, the running device is started, and the exhausting is started, so that the vacuum degree in the vacuum chamber reaches a standard vacuum of about 10 Pa. The general exhaust time takes about a few minutes.

2) Introducing a gas for plasma cleaning into the vacuum chamber and keeping the pressure inside the chamber stable. Depending on the cleaning material, gases such as oxygen, argon, hydrogen, nitrogen, and carbon tetrafluoride can be used.

3) Applying a high-frequency voltage between the electrode in the vacuum chamber and the grounding device to cause the gas to be broken down, and plasmaization and plasma generation by glow discharge, so that the plasma generated in the vacuum chamber is completely covered and processed. The workpiece starts to be cleaned, and the general cleaning process lasts for several tens of seconds to several tens of minutes.

4) After the cleaning is completed, the power is cut off, and the gas and vaporized dirt are removed by a vacuum pump.


真空等離子清洗機整個清洗過程與廣泛應用于(圖1)


1. Metal activation treatment:
 Although it is possible to activate the metal, the activation of the metal is very unstable, so the effective time is short. If the metal is activated, subsequent processing (gluing, painting, etc.) must be carried out in a matter of minutes or hours, as the surface will soon permanently bind to the dirt in the ambient air. It is preferable to carry out the metal activation treatment before implementing a process such as soldering or bonding.

2 plastic activation treatment:
Plastics such as polypropylene or PE are non-polar structures. This means that these plastics must be pretreated before printing, painting and bonding. As a process gas, dry and oil-free compressed air is usually used.
The immersed workpiece and the untreated workpiece are immersed in water (polar solution), and the activation effect is extremely impressive. On the untreated parts, droplets of normal shape are formed. The treated parts of the treated parts are completely wetted by water.

3. Can I activate glass and ceramics?
Glass and ceramics behave like metals, and active treatments have a shorter shelf life. As a process gas, compressed air is usually used.


Vacuum plasma cleaners are widely used
Plasma cleaning, etching, plasma plating, plasma coating, plasma ashing and surface modification. Through its treatment, it can improve the wetting ability of the material surface, enable a variety of materials to be coated, plated, etc., enhance adhesion, bonding force, and remove organic pollutants, oil or grease.
The biggest technical feature of the vacuum plasma cleaner is that it can process different substrates regardless of the metal, semiconductor, oxide or polymer materials (such as polypropylene, polyvinyl chloride, tetrafluoroethylene, polyacyl). High polymers such as imines, polyesters, and epoxy resins can be handled well by plasma, and therefore, are particularly suitable for substrate materials that are not heat resistant and solvent resistant. It is also possible to selectively clean the entire, partial or complex structure of the material.


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Shenzhen Fangrui Technology Co., Ltd. specializes in the production of vacuum plasma cleaning machine, atmospheric pressure plasma processing equipment
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